COURSE INFO
VECTOR[3-0-0:3]
PREVIOUS CODESMMG 6000C
DESCRIPTIONThis course covers the foundations of today’s microfabrication technologies. Topics include lithography, etching, surface micromachining technology, bulk micromachining, microsystem integration, device design, and mask layout. Special topics of the examples of MEMS applications will also be discussed.

SMMG 5100 - Microelectromechanical Systems (MEMS) Fabrication Technology (3 units)

SectionDate & TimeRoomInstructorQuotaEnrolAvailWaitRemarks
L01 (6163) MoWe 10:30AM - 11:50AMRm 102, E1WANG, Yunda3012180